MKS-1179A-Mass-Flow-Controller-User-Manual操作说明书手册

.8mks.8mksTechnology for ProductivityMASS-FLO CONTROLLERFlowType 1179AGENERAL PURPOSE MASS-FLO CONTROLLERThe MKS Type 1179 is a general purpose mass flow controller designed to measure andcontrol the flow of gases in a wide variety of applications.Type 1179 Mass-FloControControllers are available with Full Scale ranges from 10 sccm to 20 slm,providing fast,repeatable flow control to as low as 0.2 sccm.It can also be used as a pressure controllerMeasurementWWW.M K Swhen connected to a suitable pressure transducer.The 1179 is a direct form-fit-function replacement for the most common MFC's on themarket today.The standard 3-inch footprint enables the 1179 to drop directly into thesame space without modifying existing gas lines.Electrical connectors are the same PCcard edge or Type"D"connectors,with the same pin-outs,signals,and functions as theirindustry counterparts,so no cable or connector rewiring is necessary.The 1179 iscompatible with MFC power supply and display electronics from MKS or othermanufacturers.Digital models include both DeviceNet'"and RS-485.See DeviceNet andRS-485-7/97 Bulletins for more information.I N S T.C O MFeatures BenefitsFor Demanding ProcessesRobust,Reliable DesignPatented'sensor design providesRigorous design and testing includesexceptional zero stabilityMTBF analysis and STRIFE testing toFull scale flow ranges from 10 sccm toensure long-term performance20 slm for precise and repeatable flowSurface finish of wetted stainlessmeasurement and controlsurfaces,cleanroom processing,andAvailable in both Analog and Digitalminimal use of elastomer seals enable(RS-485 and DeviceNet)versionsuse in demanding clean processesPercent of full scale accuracy for analogCE Mark compliant-meetsconfigurationsrequirements for European UnionPercent of reading accuracy with digitalThree year warranty ensures quality andconfigurationscustomer satisfactionFast warm-up time minimizes expensiveproduction downtimeCompatible with earlier MKS MFC andpower supply/readout modules'U.S.Patent No.5461913.Foreign Palents Pending○○