XTM®ThinFilmDepositionMonitor_操作说明书手册

INFICONPREFACELEYBOLD-HERAEUSThe XTM Manual contains information on installation,operation,and maintenance forthe Thin Film Thickness and Rate Monitor.The contents of each section of the manual arelisted below.From time to time,additional technical data or application information may becomeavailable.To be certain that you receive this updated information,please fill out and returnthe User Registration Card in the front of this manual.Section 1-GENERAL INFORMATION -contains specifications for the XTM and thesensors as well as unpacking and inspection procedures.Section 2-PROGRAMMING AND CHECK PROCEDURES provides a descriptionof the functional characteristics of the instrument and gives instructions for programmingand testing the unit prior to installation.Section 3-INSTALLATION AND REAR PANEL CONNECTIONS contains detailedinstructions for installing the unit and the sensors,and includes information on making theback panel connections.This section also includes an explanation of the operation of thesputtering sensor.Section 4-CALIBRATION AND MEASUREMENT THEORY gives instructions forcalibrating density,z-ratio,tooling,and analog output,and includes a brief explanation ofmeasurement theory for those who may be interested in the evolution of quartz-crystalfilm thickness monitors.Section 5-MAINTENANCE AND REPAIR -consists of routine maintenanceprocedures and a troubleshooting section to pinpoint malfunctions that can be correctedin the field by qualified personnel.Section 6-SCHEMATICS-includes electrical schematics and outline drawings to assistin installation and maintenance.