多功能低電壓穿透式電子顯微鏡-20231221

核心設施中心Multifunctional Low-Voltage TransmissionCore Facility Center Electron Microscope,LV-TEM[EM025800]多功能低電壓穿透式電子顯微鏡FunctionLow-Voltage (10 ~120 kV)to reduce damage ofsampleBright-Field and Dark-Field ImageSelected Area Electron Diffraction,SAEDSTEM Mode with Annular Detector,STEM-ABF ADFEnergy Dispersive Spectrometer,EDSMultiple Types of Holders:■Specimen quick change holder(X tilt±14)Specimen tilting beryllium holder (X Y tilt+9)■High tilt specimen holder(tilt±7o)SpecificationBeryllium analytical holder(Stronger EDS signal)JEOL JEM1400FlashSpecimen quartet holder(4 Samples in one holder)FilamentLaBaHeating holder(up to 1300'C)Acc.Voltage10-120kW0.14 nm (Lattice)/ApplicationTEM Resolution0.33 nm (Point)Lattice ImageSelected AreaSTEM Resolution1.5nmTEM BF ImageTEM DF ImageElectron DiffractionTEM MagnificationX10~1200000Silicon[110]STEM MagnificationX120-2000000Spot Size30nmGatan Rio9 CMOS CameraSensor Size27.8x27.8mmPixels3072×3072Full Sensor Read-Out Speed 15 fpsDynamic Range>16 bitsOxford Ultim max EDSSTEM ADF ImageEDS MappingMo La1Sensor Size80mm2MoS:on Carbon FilmMap Data 2Mo Data 2ResolutionCs56ev,F≤64eV,Mn≤127eVWorking PrincipleIncident Electron BeamCharacteristic X-Rays(Collected by EDS detector)500nmSampleSTEM ABF ImageEDS Elemental AnalysisScattered ElectronSTEM-Annular Detector(Collected by cameraannular detector tosy Tu-form image)Direct Electron Beam.(Collected by cameraannular detector to formimage)Camera鄭宇軒/技術員Mr.Yu-Hsuan Chengz10809028@ncku.edu.tw06-2757575ext.31357圆立X⑦大厚National Cheng Kung University