STC-2000A DEPOSITION CONTROLLERUSERS MANUAL518-031Rev A,January 7,2004Sycon STC-2000A Deposition ControllerSTATUSSy心onSTOPMENUSTARTHAND CONTROLLERZEROMANUALSTC-2000A THICKNESS/RATE CONTROLLERSENSOR1/o4/o3/02/o1Syco囧RS2320(∈△IARG△1OO电9O NOINPUTS/OUTPUTS0LFiE0PERS02N日SOURCE
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